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SFM3xxx-AW/D | Mass Flow Meter for Gases | -100...250slm | 2...7% ±0,05slm | Air | 0,66...1,07bar Absolute | 22mm cone/22mm socket, ISO5356 | I2C | +10...+50°C | 5V | Autoclavable |
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SFC5500 | Mass Flow Controller for Gases | 0,5slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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SFC6000D | Mass Flow Controller for Gases | 20slm | 2% or 0,2% FS *1 | Air/N2 and CO2 | 10bar Gauge, 7bar Differential | Legris 6mm | I2C, RS485 | +5...+50°C | 24V ± 1,2V DC | *1 Air/N2, whichever error is larger, for other gases see datasheet |
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SFC6000D | Mass Flow Controller for Gases | 50slm | 2% or 0,2% FS *1 | Air/N2 and CO2 | 10bar Gauge, 7bar Differential | Legris 6mm | I2C, RS485 | +5...+50°C | 24V ± 1,2V DC | *1 Air/N2, whichever error is larger, for other gases see datasheet |
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SFC6000D | Mass Flow Controller for Gases | 5slm | 2% or 0,2% FS *1 | Air/N2 and CO2 | 10bar Gauge, 7bar Differential | Legris 6mm | I2C, RS485 | +5...+50°C | 24V ± 1,2V DC | *1 Air/N2, whichever error is larger, for other gases see datasheet |
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SFM3xxx-AW/D | Mass Flow Meter for Gases | ±250slm | 3...7% ±0,1slm | Air | 0,54...1,1bar Absolute | 15mm cone 22mm socket/22mm socket 15mm cone, ISO5356 | I2C | +5...+50°C | 5V | Autoclavable |
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SFM3xxx-AW/D | Mass Flow Meter for Gases | ±250slm | 3...7% ±0,1slm | Air | 0,54...1,1bar Absolute | 15mm cone 22mm socket/22mm socket 15mm cone, ISO5356 | I2C | +5...+50°C | 5V | Single use |
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SFM4300 | Mass Flow Meter for Gases | 0...20slm | ±2% ±0,005 slm (Typ., Air, O2) | O2, Air, N2O, CO2, Air/O2 mixture, N2O/O2 mixture, CO2/O2 mixture | 0,66...7bar Absolute | Push in fittings (Legris) | I2C | +5...+50°C | 3...5,5V | - |
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SFM4300 | Mass Flow Meter for Gases | 0...50slm | ±2,1% ±0,006 slm (Typ., Air, O2, 0...20slm) | Air, O2, other gases and mixtures on request for OEM projects | 0,66...7bar Absolute | Push in fittings (Legris) | I2C | +5...+50°C | 3...5,5V | - |
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SFM6000D | Mass Flow Meter for Gases | 20slm | 2% or 0,2% FS *1 | Air/N2 and CO2 | 10bar Gauge | Legris 6mm | I2C, RS485 | +5...+50°C | 24V ± 1,2V DC | *1 Air/N2, whichever error is larger, for other gases see datasheet |
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SFM6000D | Mass Flow Meter for Gases | 50slm | 2% or 0,2% FS *1 | Air/N2 and CO2 | 10bar Gauge | Legris 6mm | I2C, RS485 | +5...+50°C | 24V ± 1,2V DC | *1 Air/N2, whichever error is larger, for other gases see datasheet |
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SFM6000D | Mass Flow Meter for Gases | 5slm | 2% or 0,2% FS *1 | Air/N2 and CO2 | 10bar Gauge | Legris 6mm | I2C, RS485 | +5...+50°C | 24V ± 1,2V DC | *1 Air/N2, whichever error is larger, for other gases see datasheet |
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SLF3x | Liquid Flow Meter | ±40ml/min | 5% or 0,05ml/min (water), 10% or 0,2mll/min (IPA) *1 | Water, IPA | 12bar | UNF 1/4"-28 flat bottom | I2C | +5...+50°C | 3,2...3,8V | *1 Whichever error is larger |
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SLF3S | Liquid Flow Meter | ±2ml/min | 5% or 0,5ul/min (water), 10% or 5ul/min (IPA) *1 | Water, IPA | 12bar | UNF 1/4"-28 flat bottom | I2C | +5...+50°C | 3,2...3,8V | *1 Whichever error is larger |
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SLF3x | Liquid Flow Meter | ±40ml/min | 5% or 0,05ml/min (water), 10% or 0,2mll/min (IPA) *1 | Water, IPA | 12bar | UNF 1/4"-28 flat bottom | I2C | +5...+50°C | 3,2...3,8V | *1 Whichever error is larger |
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SLF3x | Liquid Flow Meter | ±1000 ml/min | ±5% or 1 ml/min up to 300 ml/min, ±10% up to 600 ml/min, ±20% up to full scale flow rate for H2O | Water, IPA | 3bar | Barb connector | I2C | +5...+50°C | 3,2...3,8V | IPA: ±10% or 1 ml/min up to 600 ml/min, ±20% up to full scale flow rate |
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- | Liquid Flow Meter Accessory | - | n/a | - | - | - | - | - | - | n/a |
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LD20 | Liquid Flow Meter | 1000ml/h | 5% or 2,5ml/h *1 | Water | 3bar | Barbed for 3,2mm ID tubing | I2C | +5...+45°C | 3,5V | *1 Whichever error are larger |
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n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a | n/a |
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SCC1 | Liquid Flow Meter Accessory | - | n/a | - | - | - | I2C / 4...20mA (0...20mA) | - | 12...36V | - |
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SCC1 | Liquid Flow Meter Accessory | - | n/a | - | - | - | I2C/USB | n/a | 12...36V | n/a |
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SFC5500 | Mass Flow Controller for Gases | 10slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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SFC5500 | Mass Flow Controller for Gases | 200slm | 1% or 0,1% FS *1 | Air/N2 | 7 bar Gauge, 5 bar Differential | Legris 10mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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SFC5500 | Mass Flow Controller for Gases | 2slm | 0,8% or 0,08% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
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SFC5500 | Mass Flow Controller for Gases | 50sccm | 2% or 0,2% FS *1 | Air/N2, He, CO2 | 10bar Gauge, 5bar Differential | Legris 6mm | RS485, DeviceNet | 0...+50°C | 15...24V DC | *1 Whichever error is larger, Air/N2, for other gases see datasheet |
